Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1995-06-06
1997-03-18
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
H02N 1300
Patent
active
056128517
ABSTRACT:
An electrostatic chuck is disclosed that is resistant to the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck. A guard ring surrounds the chuck and floats close to the self-bias potential induced by the plasma on the wafer. The voltage between the wafer and the closest electrode is thereby capacitively divided by the guard ring.
REFERENCES:
patent: 5400209 (1995-03-01), Moslehi
patent: 5436790 (1995-07-01), Blake et al.
patent: 5444597 (1995-08-01), Blake et al.
patent: 5463525 (1995-10-01), Barnes et al.
Barnes Michael S.
Keller John H.
Logan Joseph S.
Tompkins Robert E.
Westerfield, Jr. Robert P.
Fleming Fritz
International Business Machines - Corporation
LandOfFree
Guard ring electrostatic chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Guard ring electrostatic chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Guard ring electrostatic chuck will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1710418