Electrostatic wafer clamp

Details Electrostatic wafer clamp Electrostatic wafer clamp

1986-12-12

1988-02-09

Hix, L. T.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H01H 106

Patent

active

047245107

ABSTRACT:
A wafer clamp is disclosed in which a high voltage capacitor is formed on a semiconductor wafer, which rests on a conductive support. The plates of the capacitor comprise a plurality of concentric rings formed on the surface of the wafer with alternate rings connected together.

REFERENCES:
patent: 4184188 (1980-01-01), Briglia
patent: 4384918 (1983-05-01), Abe
patent: 4480284 (1984-10-01), Tojo et al.
patent: 4502094 (1985-02-01), Lewin et al.
patent: 4645218 (1987-02-01), Ooshio et al.

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