Actuator, image projection apparatus and production method...

Details Actuator, image projection apparatus and production method... Actuator, image projection apparatus and production method...

2011-04-12

2011-04-12

Tamai, Karl I (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S224100

Reexamination Certificate

active

07923894

ABSTRACT:
The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.

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