Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent
1999-12-02
2000-10-31
Ponomarenko, Nick
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
318116, 310308, 361235, H02N 100
Patent
active
061407372
ABSTRACT:
An electrostatic actuator and a method for actuating a micro-machine structure. The micro-machine structure has a stationary part and a movable part that is relatively movable between a rest position and an activated position and is resiliently connected to the stationary part. The stationary part and the movable part form a flexible sub-structure having a resonant frequency. The actuator comprises a first electrode disposed on the stationary part and a second electrode disposed on the movable part. The actuator also includes a wave generator, connected to the first electrode and the second electrode, for generating an alternating voltage signal to the first electrode and a reference voltage signal to the second electrode so as to impart an electrostatic force between the stationary and movable parts and to move the movable part from the rest position to the activated position. The electrostatic force for fixed amplitude wave has a constant force component and a vibratory force component. The alternating voltage signal has a frequency sufficiently higher than the resonant frequency of the sub-structure so that the vibratory force component is absorbed by the sub-structure and the activated position remains substantially constant. The actuator motion or position is controlled by varying the amplitude of the alternating voltage signal.
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Lucent Technologies - Inc.
Mullins B
Ponomarenko Nick
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