Apparatus and method for charge neutral micro-machine control

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

318116, 310308, 361235, H02N 100

Patent

active

061407372

ABSTRACT:
An electrostatic actuator and a method for actuating a micro-machine structure. The micro-machine structure has a stationary part and a movable part that is relatively movable between a rest position and an activated position and is resiliently connected to the stationary part. The stationary part and the movable part form a flexible sub-structure having a resonant frequency. The actuator comprises a first electrode disposed on the stationary part and a second electrode disposed on the movable part. The actuator also includes a wave generator, connected to the first electrode and the second electrode, for generating an alternating voltage signal to the first electrode and a reference voltage signal to the second electrode so as to impart an electrostatic force between the stationary and movable parts and to move the movable part from the rest position to the activated position. The electrostatic force for fixed amplitude wave has a constant force component and a vibratory force component. The alternating voltage signal has a frequency sufficiently higher than the resonant frequency of the sub-structure so that the vibratory force component is absorbed by the sub-structure and the activated position remains substantially constant. The actuator motion or position is controlled by varying the amplitude of the alternating voltage signal.

REFERENCES:
patent: 5768007 (1998-06-01), Knipe et al.
patent: 5768009 (1998-06-01), Little
patent: 5869916 (1998-06-01), Suzuki et al.
patent: 5872313 (1999-02-01), Zarabadi et al.
patent: 5914553 (1999-06-01), Adams et al.
patent: 5923798 (1999-07-01), Aksyuk et al.
patent: 5945898 (1999-08-01), Judy et al.
patent: 5986381 (1999-11-01), Hoen et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus and method for charge neutral micro-machine control does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for charge neutral micro-machine control, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for charge neutral micro-machine control will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2055499

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.