Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2009-10-28
2010-10-05
Tamai, Karl I (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
C359S225100, C359S291000
Reexamination Certificate
active
07808150
ABSTRACT:
An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions31and32secured to a supporting substrate4through a spacer, fixed portions33and34secured to the supporting substrate4with no intervention of the spacer, fixed comb electrodes331and341integrally formed the fixed portions33and34and meshing with movable comb electrodes211and212in a spaced-apart relationship, and bridge portions35and36for connecting the fixed portions33and34to the second supporting portions31and32. The fixed portions33and34are affixed to the supporting substrate4in a condition that they are deflected toward the supporting substrate4with respect to the second supporting portions31and32while bending the bridge portions35and36, thereby initially deflecting the fixed comb electrodes331and341so as to be out of alignment with the movable comb electrodes211and212in a thickness direction of the supporting substrate4.
REFERENCES:
patent: 5959760 (1999-09-01), Yamada et al.
patent: 6910379 (2005-06-01), Eskridge et al.
patent: 7089666 (2006-08-01), Kim et al.
patent: 7095156 (2006-08-01), Yoda
patent: 7161274 (2007-01-01), Tsuboi et al.
patent: 7161275 (2007-01-01), Yoda
patent: 7550895 (2009-06-01), Tsuboi et al.
patent: 2003/0082917 (2003-05-01), Hopkins et al.
patent: 2006/0279169 (2006-12-01), Yoda et al.
patent: 2009/0218909 (2009-09-01), Tsuboi et al.
patent: 2010/0045137 (2010-02-01), Yoda et al.
patent: 2004-013099 (2004-01-01), None
patent: 2004-219839 (2004-08-01), None
patent: 2005-088188 (2005-04-01), None
patent: 2005-137102 (2005-05-01), None
patent: 2005-143235 (2005-06-01), None
Ki-Hun jeong and Luke P. Lee, “A novel fabrication method of a vertical comb drive using a single SOI wafer for optical MEMS applications”, Transducers, Solid-State Sensors, Actuators and Microsystems, 12thInternational Conference on 2003, Jun. 12, 2003, vol. 2, pp. 1462-1465.
Isamoto et al., “Self-Assembly Technique for MEMS Vertical Comb Electrostatic Actuator”, ICICE Electronis Express, vol. 2, No. 9, 311-315, May 10, 2005.
Xie et al. “A CMOS-MEMS Mirror with Curled-Hinge Comb Drives”, Journal of Microelectronmechanical Systems, vol. 12, No. 4, Aug. 2003.
Patterson et al., “A Scanning Micromirror With Angular Comb Drive Actuation”, IEEE Feb. 2002.
Machine Translation of JP 2004-219839, Sasaki et al., “Three Dimensional Structure and Its Manufacturing Method, and Electronic Equipment”, Aug. 5, 2004.
Isamoto Keiji
Toshiyoshi Hiroshi
Yoda Mitsuhiro
Harness & Dickey & Pierce P.L.C.
Santec Corporation
Seiko Epson Corporation
Tamai Karl I
The University of Tokyo
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