Actuator

Details Actuator Actuator

2005-12-14

2008-09-02

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

Reexamination Certificate

active

07420315

ABSTRACT:
An actuator having a rotation central axis includes: an insulative frame; movable comb electrodes having first electrode teeth; a movable portion between the movable comb electrodes; supporting portions on the frame supporting the movable comb electrodes and the movable portion; fixed comb electrodes on the frame corresponding to the movable comb electrodes and provided with second electrode teeth; first elastic connecting portions connecting the movable comb electrodes to the supporting portions so each movable comb electrode can rotate around the rotation central axis; and second elastic connecting portions connecting the movable portion to the movable comb electrodes so that the movable portion can rotate around the rotation central axis. Each movable comb electrode is driven by an alternating voltage between each fixed comb electrode and movable comb electrode. Part of the first electrode teeth overlaps part of the second electrode teeth when no alternating voltage is applied.

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Kurt E. Peterson, “Silicon Torsional Scanning Mirror”, IBM J. Res. Develop., vol. 24, No. 5, pp. 631-637 (1980).

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