Radio frequency ion beam source

Radio frequency ion source with maneuverable electrode(s)

Radio frequency power control system

Radio-frequency plasma source

Radio-frequency powered glow discharge device and method with hi

Reflection coefficient phase detector

Remote ion source plasma electron gun

Remote plasma generator

Resonant chamber applicator for remote plasma source

Resonant radio frequency wave coupler apparatus using higher mod

Resonant radiofrequency wave plasma generating apparatus with im

RF electron gun with cathode activating device

RF induction plasma source for plasma processing

RF matching network of a vacuum processing chamber and...

RF plasma inductor with closed ferrite core

RF plasma processing method and RF plasma processing system

RF plasma source and antenna therefor

RF plasma source and method for plasma cleaning of surface in sp

RF plasma source for material processing

RF plasma source with quasi-closed solenoidal inductor