Radio frequency ion source with maneuverable electrode(s)

Details Radio frequency ion source with maneuverable electrode(s) Radio frequency ion source with maneuverable electrode(s)

2005-06-14

2005-06-14

Vo, Tuyet Thi (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

C315S111710, C315S111410, C250S426000, C250S42300F, C250S42300F

Reexamination Certificate

active

06906469

ABSTRACT:
An rf ion source suitable for low power operation over a range of pressures in air which comprises discharge electrode, a cathode and an anode, the cathode being connected to an rf signal supply through an associated coupling means and the anode adapted to provide a surface area over which a plasma discharge may occur no greater than substantially that of the cathodal area over which the discharge may occur. The anode and cathode are arranged to be maneuverable with respect to one another in order to reduce the power requirements of the system and provide a means of controlling the rf discharge and ionization. An extended rf ion source, comprising a series of electrode pairs, provides flexibility for use in a variety of circumstances.

REFERENCES:
patent: 4092543 (1978-05-01), Levy
patent: 4521719 (1985-06-01), Liebel
patent: 4630566 (1986-12-01), Asmussen et al.
patent: 5444258 (1995-08-01), Grigoryan et al.
patent: 5684300 (1997-11-01), Taylor et al.
patent: 5849372 (1998-12-01), Annaratone et al.
patent: 5877593 (1999-03-01), Langford et al.
patent: 6407382 (2002-06-01), Spangler
patent: 420360 (1934-11-01), None
patent: 2296369 (1996-06-01), None
patent: 2311411 (1997-09-01), None
patent: 01244619 (1989-09-01), None
patent: WO 93/11554 (1993-06-01), None
patent: WO 96/19822 (1996-06-01), None
patent: WO 00/75953 (2000-12-01), None
Japanese Patent Abstract No. 08306499, Nov. 22, 1996.
Japanese Patent Abstract No. 63206484, Aug. 25, 1988.

Affiliated with

Also associated with

Rating

Radio frequency ion source with maneuverable electrode(s) does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radio frequency ion source with maneuverable electrode(s), we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radio frequency ion source with maneuverable electrode(s) will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3517069