Multiple filament enhanced ion source

Multiple frequency plasma processor method and apparatus

Multiple frequency plasma processor method and apparatus

Multiple-beam ion-beam assembly

Multirate processing for metrology of plasma RF source

Negative ion generator

Negative ion generator

Negative ion source with hollow cathode discharge plasma

Nonthermionic hollow anode gas discharge electron beam source

One atmosphere, uniform glow discharge plasma

Operating a plasma process

Optimization of the excitation frequency of a resonator

Optimized ECR plasma apparatus with varied microwave window thic

Optimized helical resonator for plasma processing

Parallel plate electron multiplier with ion feedback...

Parallel scan type ion implanter

Particle accelerator

Particle accelerator employing transient space charge potentials

Particle controller

Particle source for a reactive ion beam etching or plasma deposi