Apparatus and methods for improving the stability of RF...

Apparatus for controlling matching network of a vacuum plasma pr

Apparatus for elimination of plasma lighting inside a gas...

Apparatus for exciting a plasma in a semiconductor wafer process

Apparatus for generating a compound plasma configuration...

Apparatus for generating a pulsed plasma in a liquid medium

Apparatus for generating low temperature plasma at...

Apparatus for generating negative ions with a lid and a casing

Apparatus for implanting metal ions in metals and ceramics

Apparatus for magnetic and electrostatic confinement of plasma

Apparatus for magnetic and electrostatic confinement of plasma

Apparatus for plasma treatment

Apparatus for producing a directed flow of a gaseous medium util

Apparatus for producing a plasma and for the treatment of substr

Apparatus for producing and sustaining a glow discharge...

Apparatus for sensing RF current delivered to a plasma with two

Apparatus for the coating of material on a substrate using a mic

Apparatus for the production of a regular microwave field

Apparatus for the production of glow discharge

Apparatus including ring-shaped resonators for producing microwa