Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent
1991-11-15
1992-12-22
LaRoche, Eugene R.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
31511141, 31323131, 20429838, H05H 146
Patent
active
051736403
ABSTRACT:
The invention relates to an apparatus for the production of a regular microwave field over a comparatively great area. This apparatus has a cavity resonator into which microwaves are put. Electromagnetic energy is coupled by special couplers, inductively or capacitively, out of the standing waves forming in the cavity resonator into a chamber in which preferably a plasma is contained.
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Geisler Michael
Jung Michael
Kessler Bernhard
LaRoche Eugene R.
Leybold Aktiengesellschaft
Yoo Do Hyun
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