Apparatus for plasma treatment

Details Apparatus for plasma treatment Apparatus for plasma treatment

1988-07-01

1990-11-06

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511101, 31511111, 31323101, 31323131, 31323151, 313307, H01J 188

Patent

active

049689185

ABSTRACT:
An apparatus for plasma treatment of long continuous materials, typically sheet materials, which comprises a plasma treatment chamber, an electric power introducing member positioned in the central portion of the chamber, a plurality of antenna electrodes radially extending from the vicinity of the electric power introducing member, a plurality of grounded electrodes facing a treating surface of the antenna electrodes, the electric power introducing member being connected with the respective ends of the antenna electrodes closest thereto, and a guide means, i.e., guide rolls, for passing treating materials through gaps between the antenna and grounded electrodes. The antenna electrodes preferably have curved surfaces bulging out with respect to the direction of travel of the treating materials.

REFERENCES:
patent: 4419869 (1983-12-01), Sando et al.
patent: 4437324 (1984-03-01), Sando et al.
patent: 4507539 (1985-03-01), Sando et al.
patent: 4550578 (1985-11-01), Sando et al.
patent: 4551310 (1985-11-01), Imada et al.

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