Apparatus including ring-shaped resonators for producing microwa

Details Apparatus including ring-shaped resonators for producing microwa Apparatus including ring-shaped resonators for producing microwa

1993-10-25

1996-05-14

Lee, Benny T.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511141, 333 99PL, 118723MW, 118723MA, 118723AN, 20429838, H05H 146

Patent

active

055170854

ABSTRACT:
A low-pressure high-density plasma is excited in a plasma chamber surrounded by a cylindrical inner wall of a ring-shaped waveguide resonator to which the microwave energy is fed by a coupling from a microwave generator. The output coupling of the microwave energy from the standing wave maintained in the waveguide resonator to the plasma chamber is effected through a multiplicity of equispaced slits whose spacing is one half or one waveguide wavelength and which extend parallel to the generatrices of the cylindrical inner wall of the ring-shaped waveguide resonator.

REFERENCES:
patent: 3577207 (1971-05-01), Kirjushin
patent: 4810938 (1989-03-01), Morsan et al.
patent: 4844007 (1989-07-01), Eikelboom
patent: 5063330 (1991-11-01), Leprince et al.
patent: 5296784 (1994-03-01), Creiseler et al.
Patent Abstract of Japan; 2-132798(A); "Plasma Generating Equipment And Ion Source Using It"; Aug. 9, 1990; vol. 14/No. 368.

Affiliated with

Also associated with

Rating

Apparatus including ring-shaped resonators for producing microwa does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus including ring-shaped resonators for producing microwa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus including ring-shaped resonators for producing microwa will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1898366