Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent
1976-05-10
1978-05-09
LaRoche, Eugene R.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
29 81C, 3132313, H01J 1502
Patent
active
040889262
ABSTRACT:
Apparatus for cleaning contaminated surfaces such as hydro-carbon contaminant films in high vacuum environments including a plasma discharge housing for allowing a plasma to be generated in an environment having a higher pressure than the surface which is to be cleaned. A ground electrode and a radio frequency electrode partially surround a quartz plasma tube, for the introduction of an ionizable gas therein. These electrodes ionize the gas and help generate the plasma. This plasma flows through a non-constrictive aperture, through the plasma discharge housing and then on to the contaminated surface.
REFERENCES:
patent: 3209189 (1965-09-01), Patrick
patent: 3437864 (1969-04-01), Kofoid et al.
Fletcher James C. Administrator of the National Aeronautics and Space
Gillette Roger B.
Shannon Roger L.
LaRoche Eugene R.
Manning John R.
Porter George J.
Wofford, Jr. L. D.
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