Plasma cleaning device

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating

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Details

29 81C, 3132313, H01J 1502

Patent

active

040889262

ABSTRACT:
Apparatus for cleaning contaminated surfaces such as hydro-carbon contaminant films in high vacuum environments including a plasma discharge housing for allowing a plasma to be generated in an environment having a higher pressure than the surface which is to be cleaned. A ground electrode and a radio frequency electrode partially surround a quartz plasma tube, for the introduction of an ionizable gas therein. These electrodes ionize the gas and help generate the plasma. This plasma flows through a non-constrictive aperture, through the plasma discharge housing and then on to the contaminated surface.

REFERENCES:
patent: 3209189 (1965-09-01), Patrick
patent: 3437864 (1969-04-01), Kofoid et al.

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