Method and apparatus for producing intense microwave pulses

Method and apparatus for producing large volume magnetoplasmas

Method and apparatus for producing microwave radiation

Method and apparatus for producing uniform process rates

Method and apparatus for producing uniform process rates

Method and apparatus for producing uniform process rates

Method and apparatus for projecting solids-containing gaseous me

Method and apparatus for providing flow-stabilized...

Method and apparatus for stabilizing switch-mode powered RF plas

Method and apparatus for the excitation of a plasma

Method and apparatus for tuning a plasma reactor chamber

Method and apparatus to monitor electrical states at a...

Method and apparatus using electron cyclotron heated plasma for

Method and device for attenuating harmonics in semiconductor...

Method and device for exciting a plasma using microwaves at the

Method and device for producing plasma with electrodes...

Method and device for removing harmonics in semiconductor...

Method and structure to segment RF coupling to silicon...

Method and system for discretely controllable plasma processing

Method for charge neutralization of surface in space with space-