Helicon plasma processing tool utilizing a ferromagnetic inducti

Details Helicon plasma processing tool utilizing a ferromagnetic inducti Helicon plasma processing tool utilizing a ferromagnetic inducti

1995-12-20

1998-06-16

Pascal, Robert

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

118723I, 118723AN, 343788, H05H 124

Patent

active

057676283

ABSTRACT:
Disclosed is a plasma dry processing apparatus for producing a plasma with a resonance zone including a chamber for plasma processing at least one workpiece, the workpiece situated at a first end of the chamber; an induction coil at a second end of the chamber, spaced from the workpiece, for providing a radio frequency induced electromagnetic magnetic field to generate a helicon plasma within the chamber; a plurality of magnetic dipoles contained within the material of the induction coil, the magnetic dipoles having their fields directed towards the interior of, and producing a well-confined plasma within, the chamber, wherein the fields are adjacent to the second end of the chamber and keep the plasma spaced from the second end of the chamber.

REFERENCES:
patent: 1130260 (1915-03-01), Dann
patent: 4716491 (1987-12-01), Ohno et al.
patent: 4745337 (1988-05-01), Pichot et al.
patent: 4990229 (1991-02-01), Campbell et al.
patent: 5032202 (1991-07-01), Tsai et al.
patent: 5081398 (1992-01-01), Asmussen et al.
patent: 5122251 (1992-06-01), Campbell et al.
patent: 5133825 (1992-07-01), Hakamata et al.
patent: 5203960 (1993-04-01), Dandl
patent: 5304279 (1994-04-01), Coultas et al.
patent: 5304282 (1994-04-01), Flamm
patent: 5557172 (1996-09-01), Tanaka
patent: 5648701 (1997-07-01), Hooke et al.
Technical Disclosure Bulletin, vol. 36, No. 5, Oct. 1992, J. J. Cuomo et al., Compact Microwave Plasma Source, pp. 307-308.

Affiliated with

Also associated with

Rating

Helicon plasma processing tool utilizing a ferromagnetic inducti does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Helicon plasma processing tool utilizing a ferromagnetic inducti, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Helicon plasma processing tool utilizing a ferromagnetic inducti will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1729610