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Damage assessment of a wafer using optical metrology

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Data integration and registration method and apparatus for...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Defect detection and repair of micro-electro-mechanical...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Defect examination apparatus

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Defect inspection apparatus and defect inspection method

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Defect inspection data processing system

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Designing an optical metrology system optimized with signal...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Detecting and diagnosing faults in HVAC equipment

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Detecting groups of defects in semiconductor feature space

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Determining metrology sampling decisions based on...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Determining profile parameters of a structure using...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Device for evaluating internal quality of vegetable or...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Device testing system and test data obtaining method

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Device that interacts with target applications

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Disposition tool for factory process control

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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Dynamic metrology sampling methods, and system for...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
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