Determining metrology sampling decisions based on...

Details Determining metrology sampling decisions based on... Determining metrology sampling decisions based on...

2007-08-14

2007-08-14

Nghiem, Michael P. (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S082000, C702S084000, C438S007000, C438S008000

Reexamination Certificate

active

11363748

ABSTRACT:
A method for determining metrology sampling rates for workpieces in a process flow includes determining a current status of the process flow. Future processing of the workpieces in the process flow is simulated based on the current status of the process flow over a predetermined time horizon to predict sampling rates for the workpieces. During the simulating, sampling rules are implemented that consider capacity constraints of a metrology resource in the process flow. Actual workpieces in the process flow are sampled based on the predicted metrology sampling rates.

REFERENCES:
patent: 6766214 (2004-07-01), Wang et al.
patent: 6957120 (2005-10-01), Bode et al.
patent: 7076321 (2006-07-01), Purdy
patent: 2005/0021272 (2005-01-01), Jenkins et al.

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