Disposition tool for factory process control

Details Disposition tool for factory process control Disposition tool for factory process control

1997-12-05

2000-11-28

Wachsman, Hal

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

702 81, 702 84, 702181, 700109, 700121, 438 14, H01L 2166

Patent

active

061547115

ABSTRACT:
A method of manufacturing semiconductor wafers using a simulation tool to determine a set of predicted wafer electrical test parameters. The set of predicted wafer electrical test parameters are compared with wafer electrical test specifications tabulated for each process during the manufacturing process. During the comparison, it is determined whether the predicted wafer electrical test parameters are within the specifications for the process and circuit simulations are then conducted using the predicted wafer electrical test parameters. Device performance is predicted from the circuit simulations and the disposition of the wafer lot is determined utilizing tabulated from a disposition performance table.

REFERENCES:
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5646870 (1997-07-01), Krivokapic et al.
patent: 5719796 (1998-02-01), Chen
patent: 5822218 (1998-10-01), Moosa et al.
patent: 5866437 (1999-02-01), Chen et al.

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