Detecting groups of defects in semiconductor feature space

Details Detecting groups of defects in semiconductor feature space Detecting groups of defects in semiconductor feature space

1997-04-02

1999-11-23

Wachsman, Hal

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

702 35, 702 81, 702 82, 702 84, 36446816, 36446817, 36446828, 438 10, 438 12, 438 18, H01L 2166

Patent

active

059916990

ABSTRACT:
Techniques for improving manufacturing process control based on inspection of manufactured items at intermediate process steps, based on clustering and binning of defect data. Additionally, the using the defect data produced by inspection machines to improve manufacturing process control specifically relating to semiconductor manufacturing process control. Examples described here relate specifically to semiconductor wafers, but may be generalized to any manufacturing process.

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