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Temperature control system for semiconductor process chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Temperature controlled chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Temperature controlled chamber liner

Coating apparatus – Gas or vapor deposition
Patent

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Temperature controlled chemical dispenser

Coating apparatus – With means to centrifuge work
Patent

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Temperature controlled distributor beam for chemical vapor depos

Coating apparatus – Gas or vapor deposition – Running length work
Patent

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Temperature controlled gas distribution plate

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Temperature controlled gas feedthrough

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Temperature controlled gas feedthrough

Coating apparatus – Gas or vapor deposition
Patent

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Temperature controlled liner

Coating apparatus – Gas or vapor deposition
Patent

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Temperature controlled process and chamber lid

Coating apparatus – Gas or vapor deposition
Patent

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Temperature gradient means in reactor tube of vapor deposition a

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Temperature probe and measurement method for low pressure proces

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Temperature ramp for vertical diffusion furnace

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Temperature sensors for vapor processing systems

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Patent

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Temperature-controlled substrate holder for processing in...

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate

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Tempering and coating plant for different masses, in particular

Coating apparatus – Projection or spray type – Moving projector
Patent

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Template guided sealant bead dispenser

Coating apparatus – Projection or spray type – Moving projector
Patent

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Temporary grate cover especially adapted for paint spray booth a

Coating apparatus – With means to apply electrical and/or radiant energy to work... – With electromagnetic and/or electrostatic removal of...
Patent

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Temporary grate cover for paint spray booth areas

Coating apparatus – With means to apply electrical and/or radiant energy to work... – With electromagnetic and/or electrostatic removal of...
Patent

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Tension mask assembly for use in vacuum deposition of thin...

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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