Temperature controlled distributor beam for chemical vapor depos

Details Temperature controlled distributor beam for chemical vapor depos Temperature controlled distributor beam for chemical vapor depos

1990-03-06

1991-11-19

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Running length work

118729, 65 601, 65 992, 651821, C23C 1600

Patent

active

050656961

ABSTRACT:
A distributor beam for depositing coating material on the surface of a sheet of glass includes a plenum for each gas to be mixed. The plenums are surrounded by a cooling fluid duct and heating elements are provided for temperature control. Theremocouples generate signals representing actual temperatures and the heaters are controlled to maintain an optimum temperature for the gases as they flow from the plenums through a mixing chamber to the surface of the glass sheet which is located below an outlet from the mixing chamber. Fastener means apply increased clamping pressure to the beam structure as the temperature increases to increase the rate of heat transfer to the cooling fluid.

REFERENCES:
patent: 3888649 (1975-06-01), Simhan
patent: 4019887 (1977-04-01), Kirkbride
patent: 4100962 (1988-07-01), Housman
patent: 4793282 (1988-12-01), Greenberg

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