Temperature controlled chemical dispenser

Details Temperature controlled chemical dispenser Temperature controlled chemical dispenser

1999-05-11

2000-08-29

Beck, Shrive

Coating apparatus

With means to centrifuge work

118 69, 118320, 427240, B05C 1100

Patent

active

061102806

ABSTRACT:
Disclosed is a temperature controlled dispense arm for dispensing chemicals in a spin coating machine. The temperature controlled dispense arm has a cooling portion containing cooling coils and a dispense arm base having chemical dispense passages. The temperature controlled dispense arm maintains the chemical dispense passages at a cooled temperature as determined by the cooling coils located in the cooling portion.

REFERENCES:
patent: 4609037 (1986-09-01), Wheeler et al.
patent: 4889069 (1989-12-01), Kawakami
patent: 5427820 (1995-06-01), Biche
patent: 5580607 (1996-12-01), Takekuma

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