Tension mask assembly for use in vacuum deposition of thin...

Details Tension mask assembly for use in vacuum deposition of thin... Tension mask assembly for use in vacuum deposition of thin...

2005-02-22

2005-02-22

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C118S504000, C204S298110

Reexamination Certificate

active

06858086

ABSTRACT:
A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.

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patent: 2002-235165 (2002-08-01), None

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