4. Coating apparatus
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Heat transfer assembly

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat transfer system for improved semiconductor processing...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat treating apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treating apparatus having heat transmission-preventing plat

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treating device

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat treatment apparatus and cleaning method of the same

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heat treatment apparatus and method of forming a thin film using

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment boat

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Heat treatment boat support

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Heat treatment device

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heat treatment furnace with an exhaust baffle

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment jig and method of producing the same

Coating apparatus – Work holders – or handling devices
Patent

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Heat treatment method and its apparatus

Coating apparatus – Condition responsive control
Reexamination Certificate

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Heat treatment method wherein the substrate holder is...

Coating apparatus – With means to apply electrical and/or radiant energy to work... – Radiant heating
Reexamination Certificate

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Heat treatment method, heat treatment apparatus and...

Coating apparatus – With vacuum or fluid pressure chamber
Reexamination Certificate

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