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Gas distributor for vapor coating method and container

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Gas distributor having directed gas flow and cleaning method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas driven planetary rotation apparatus and methods for...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Gas exhaust system and pump cleaning system for a semiconductor

Coating apparatus – Gas or vapor deposition
Patent

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Gas feed ceramic structure for semiconductor-producing...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas feeding device for controlled vaporization of an organanomet

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Gas feeding device for controlled vaporization of an organometal

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Gas feeding device for controlled vaporization of an organometal

Coating apparatus – Gas or vapor deposition
Patent

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Gas feeding system for chemical vapor deposition reactor and...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas feedthrough with electrostatic discharge characteristic

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas flow division in a wafer processing system having...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Gas flow system for CVD reactor

Coating apparatus – Gas or vapor deposition
Patent

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Gas flow systems in CCVD reactors

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Gas foil rotating substrate holder

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Gas gate for isolating regions of differing gaseous pressure

Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate

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Gas handling device assembly used for a CVD apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Gas heating apparatus for chemical vapor deposition process...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas injection apparatus for semiconductor processing system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas injection disc assembly for CVD applications

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Gas injection slit nozzle for a plasma process reactor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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