Apparatus and method for depositing large area coatings on...

Apparatus and method for depositing large area coatings on...

Apparatus and method for depositing low K dielectric materials

Apparatus and method for efficient and compact remote microwave

Apparatus and method for electrically isolating an electrode...

Apparatus and method for forming a deposited film by a means...

Apparatus and method for forming a deposited film by means...

Apparatus and method for forming an oxynitride insulating...

Apparatus and method for forming deposited film

Apparatus and method for forming low dielectric constant film

Apparatus and method for forming semiconductor thin layer

Apparatus and method for gas phase coating of hollow articles

Apparatus and method for generating plasma

Apparatus and method for growing semiconductor crystal

Apparatus and method for igniting plasma in a process module

Apparatus and method for improving plasma distribution and...

Apparatus and method for laser deposition of durable coatings

Apparatus and method for magnetron in-situ cleaning of plasma re

Apparatus and method for manufacturing a semiconductor device

Apparatus and method for manufacturing semiconductor device