Fixing structures and supporting structures of ceramic...
Flat antenna having openings provided with conductive...
Flat antenna having rounded slot openings and plasma...
Flexibly suspended gas distribution manifold for plasma chamber
Flow-through ion beam source
Fluid injector for and method of prolonged delivery and...
Focus ring for semiconductor wafer processing in a plasma reacto
Focused ion beam deposition
Focused particle beam systems and methods using a tilt column
Focused particle beam systems and methods using a tilt column
Formation of photoconductive and photovoltaic films
Furnace equipped with independently controllable heater elements