Focused ion beam deposition

Details Focused ion beam deposition Focused ion beam deposition

2007-02-06

2007-02-06

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

Reexamination Certificate

active

10209453

ABSTRACT:
Introducing at least one metal such as cobalt, molybdenum, metal carbonyl, tungsten, platinum, or other suitable metal to a focused ion beam. Introducing the focused ion beam to a substrate within a processing chamber. Forming at least one layer over a substrate. Applying heat to the layer by, for example, a laser.

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