Furnace equipped with independently controllable heater elements

Details Furnace equipped with independently controllable heater elements Furnace equipped with independently controllable heater elements

1995-08-11

1997-02-18

Kunemund, Robert

Coating apparatus

Gas or vapor deposition

With treating means

118728, 118500, 118666, 219390, 219411, 392416, C23C 1100

Patent

active

056037724

ABSTRACT:
A furnace available for diffusion and oxidation is equipped with a plurality of groups of temperature sensors monitoring respective zones heated by associated heater elements, and a plurality of controller vary electric currents supplied to the heater elements so as to create a uniform temperature distribution around semiconductor wafers.

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patent: 5380553 (1995-01-01), Loboda

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