Two-step AIN-PVD for improved film properties
Two-step deposition process for preventing arcs
Ultra-high vacuum apparatus and method for high productivity phy
Ultrasonic enhancement of aluminum step coverage and apparatus
Ultraviolet filters with enhanced weatherability and method...
Underlayer doping in thin film magnetic recording media
Unique passivation technique for a CVD blocker plate to...
Use of calcium and strontium dopants to improve retention perfor
Use of heavy halogens for enhanced facet etching
Use of modulated inductive power and bias power to reduce...
Use of RF biased ESC to influence the film properties of Ti...
Use of variable impedance having rotating core to control...
Use of variable impedance to control coil sputter distribution
Use of variable impedance to control coil sputter distribution
Use of variable RF generator to control coil voltage...
Vacuum processing method
Vacuum treatment apparatus and vacuum treatment method
Vacuum treatment chamber
Vacuum treatment chamber and method for treating surfaces
Vacuum treatment system