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Sputtering method and apparatus for depositing a coating...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and apparatus for optimum saturation magnetost

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and apparatus using a trigger gas feed

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and sputtering apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for fabricating thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for filling holes with copper

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for forming an aluminum or aluminum alloy...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for forming dielectric films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for forming film and apparatus therefor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for making thin film field effect transistor u

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method for producing layered aluminium fine particles

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method in multi-chambered device

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method of making thin film head having improved satur

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method of manufacturing Fe-Ai-N-O laminated films...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method of producing and electroluminescent device...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method to generate ionized metal plasma using...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method utilizing an extended plasma region

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering methods for depositing stress tunable tantalum and ta

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering of aligned magnetic materials and magnetic dipole...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering of lithium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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