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Sputtering device

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputtering device

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering device adaptable for coating heat-sensitive substrate

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering device and target with cover to hold cooling fluid

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering device and target with cover to hold cooling fluid

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering device for coating an essentially flat...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering device with a cathode with permanent magnet system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering electrode

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering installation for the reactive coating of a substrate

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering installation with two longitudinally placed...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering magnetron

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering method and apparatus with optical monitoring

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering method and apparatus with small diameter RF coil

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering of lithium

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering process and an apparatus for carrying out the same

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering reactor and method of using an unbalanced magnetron

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering shield

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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