Radio frequency induction/multipole plasma processing tool

Details Radio frequency induction/multipole plasma processing tool Radio frequency induction/multipole plasma processing tool

1992-09-28

1994-04-19

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156643, 118723I, 20429816, 20429837, H01L 2100, H01J 724

Patent

active

053042794

ABSTRACT:
A dry processing apparatus for plasma etching or deposition includes a chamber for plasma processing having an external wall for housing a work piece with a surface to be plasma processed. A source of an induction field is located outside the chamber on its opposite side from the work piece. A radio frequency induction field applied to the chamber generates a plasma. The plasma is confined within the external wall in the chamber by magnetic dipoles providing a surface magnetic field for confining the plasma. The surface magnetic field is confined to the space adjacent to the external wall. An R.F. generator provides an R.F. generated bias to the work piece. The chamber is lined with a material inert to a plasma or noncontaminating to the work piece, and the induction source in the form of a spiral or involute shaped induction coil is located on the exterior of the liner material on the opposite side of the chamber from the work piece. Distribution of gas to the chamber is uniform because a manifold located about the periphery of the chamber and an orifice formed by the surface of the chamber and the manifold admits gas from the manifold into the chamber at a uniform pressure about the periphery of the cover of the chamber.

REFERENCES:
patent: 4362632 (1982-12-01), Jacob
patent: 4491496 (1985-01-01), Laporte et al.
patent: 4786352 (1988-11-01), Benzing
patent: 4810935 (1989-03-01), Boswell
patent: 4826585 (1989-05-01), Davis

Affiliated with

Also associated with

Rating

Radio frequency induction/multipole plasma processing tool does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Radio frequency induction/multipole plasma processing tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radio frequency induction/multipole plasma processing tool will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-17732