Device to generate excited/ionized particles in a plasma

Diagnostic head assembly for plasma chamber

Diamond coated parts in a plasma reactor

Die pickup apparatus for picking up semiconductor dies and...

Direct vapor delivery of enabling chemical for enhanced HF...

Discharge electrode and process chamber of dry etching facility

Distributed system and code for control and automation of plasma

Diverter magnet arrangement for plasma processing system

Dome-shaped inductive coupling wall having a plurality of...

Downstream plasma reactor system incorporating a...

Downstream plasma reactor system with an improved plasma tube se

Draft chamber

Drip chemical delivery apparatus

Driving mechanism for chip detachment apparatus

Dry etcher apparatus for preventing residual reaction gas from c

Dry etching apparatus

Dry etching apparatus

Dry etching apparatus

Dry etching apparatus

Dry etching apparatus