Diagnostic head assembly for plasma chamber

Details Diagnostic head assembly for plasma chamber Diagnostic head assembly for plasma chamber

1996-07-17

1999-03-23

Bueker, Richard

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

H01L 2100

Patent

active

058854029

ABSTRACT:
The present invention generally provides a diagnostic head assembly which preferably includes both optical and non-optical diagnostic devices which locates the diagnostic devices in proximity to the processing region of a plasma reactor to enable in situ process control. Such diagnostic head assembly may include a quartz crystal microbalance, an optical endpoint detector and a Langmuir probe. The invention also provides microprocessor control of a plasma process using the information gathered from the optical and non-optical diagnostic devices. The invention further provides a plasma reactor that includes both optical and non-optical diagnostic devices positionable in a single diagnostic port provided in a sidewall of the reactor.

REFERENCES:
patent: 4376672 (1983-03-01), Wang et al.
patent: 5117192 (1992-05-01), Hurd
patent: 5282925 (1994-02-01), Jeng et al.
patent: 5339039 (1994-08-01), Carlile et al.

Affiliated with

Also associated with

Rating

Diagnostic head assembly for plasma chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Diagnostic head assembly for plasma chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diagnostic head assembly for plasma chamber will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2121708