Matching circuit for a complex radio frequency (RF) waveform

Details Matching circuit for a complex radio frequency (RF) waveform Matching circuit for a complex radio frequency (RF) waveform

2008-06-19

2010-10-12

Vo, Tuyet Thi (Department: 2821)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

Having glow discharge electrode gas energizing means

C156S345480, C156S345470, C118S7230IR, C118S7230VE, C118S7230IR, C118S7230ER

Reexamination Certificate

active

07811410

ABSTRACT:
A complex waveform frequency matching device is disclosed. In various embodiments, the matching device comprises a plurality of radio frequency generators coupled in parallel with one another. Each subsequent one of the plurality of radio frequency generators is configured to produce a harmonic frequency related by an integral multiple to a frequency produced by any lower-frequency producing radio frequency generator, thereby generating a complex waveform. A plurality of frequency splitter circuits is coupled to an output of the plurality of radio frequency generators, and each of a plurality of matching networks has an input coupled to an output of one of the plurality of frequency splitter circuits and an output configured to be coupled to a plasma chamber.

REFERENCES:
patent: 6917204 (2005-07-01), Mitrovic et al.
patent: 7169256 (2007-01-01), Dhindsa et al.
patent: 7503996 (2009-03-01), Chen et al.
patent: 2003/0054647 (2003-03-01), Suemasa et al.
patent: 2004/0035837 (2004-02-01), Mitrovic et al.
patent: 2005/0133163 (2005-06-01), Shannon et al.
patent: 2005/0264218 (2005-12-01), Dhindsa et al.
“International Application Serial No. PCT/US2009/047675, International Search Report and Written Opinion mailed Jan. 29, 2010”, 10 pgs.

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