Lithographic image size reduction

Lithographic technique using laser for fabrication of electronic

Lithographic technique using laser scanning for fabrication of e

Lithography control on uneven surface

Local interconnect

Local interconnect etch technique

Local oxidation of silicon process

Localized plasma processing

Low cost method of fabricating epitaxial semiconductor devices

Low damage-producing, anisotropic, chemically enhanced etching m

Low defect etching of patterns using plasma-stencil mask

Low dispersion optical fiber wave guiding structures with period

Low energy ion etching

Low friction, wear resistant plastic parts

Low gravity enhanced growth of phthalocyanine polymorphs and fil

Low pressure anisotropic etch process for tantalum silicide or t

Low reflectivity surface formed by particle track etching

Low resistance electrodes useful in flat panel displays

Low temperature anisotropic ashing of resist for semiconductor f

Low temperature dry etch of copper