Lithographic technique using laser scanning for fabrication of e

Details Lithographic technique using laser scanning for fabrication of e Lithographic technique using laser scanning for fabrication of e

1989-06-22

1993-06-22

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156651, 1566591, 156635, 156637, H01L 2100

Patent

active

052214222

ABSTRACT:
A microlithographic process of fabricating electronic components, such as, for example, integrated circuit chips and thin film read/write heads for computer disk systems, in which a laser is used to etch features defined by a mask. The laser is selected whose radiation will be absorbed by the workpiece being etched, and the masking material is selected so as to be highly reflective of the laser radiation. The masking material is patterned in a conventional manner so as to expose the portions of the workpiece material to be etched. When the laser is directed to the workpiece, the laser radiation etches the portions of the workpiece not protected by the mask. A preferred process of scanning with a laser is disclosed. Etching may be improved if performed under a liquid transparent to the laser radiation.

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