Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2005-06-14
2005-06-14
Weiss, Howard (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S416000
Reexamination Certificate
active
06906395
ABSTRACT:
The present invention is an apparatus and method for a micro-machined electromechanical system (MEMS) device having a hermetically sealed sensor or actuator device mechanism that is electrically interconnected by diffused conductive paths to a plurality of wire bond pads that are located external to the hermetic seal.
REFERENCES:
patent: 4023562 (1977-05-01), Hynecek et al.
patent: 4291293 (1981-09-01), Yamada et al.
patent: 4295115 (1981-10-01), Takahashi et al.
patent: 4945765 (1990-08-01), Roszhart
patent: 5006487 (1991-04-01), Stokes
patent: 5243861 (1993-09-01), Kloeck et al.
patent: 5334901 (1994-08-01), Albert et al.
patent: 5456110 (1995-10-01), Hulsing, II
patent: 5456111 (1995-10-01), Hulsing, II
patent: 5559290 (1996-09-01), Suzuki et al.
patent: 5591679 (1997-01-01), Jakobsen et al.
patent: 5866469 (1999-02-01), Hays
patent: 5948981 (1999-09-01), Woodruff
patent: 5996411 (1999-12-01), Leonardson et al.
patent: 6074891 (2000-06-01), Staller
patent: 6119520 (2000-09-01), Woodruff
patent: 6346742 (2002-02-01), Bryzek et al.
patent: 6428713 (2002-08-01), Christenson et al.
patent: 0 742 581 (1996-11-01), None
patent: 1 096 260 (2001-05-01), None
Honeywell International , Inc.
Rupnick Attorney at Law Charles J.
Weiss Howard
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