Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2011-08-30
2011-08-30
Gebremariam, Samuel A (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C359S290000
Reexamination Certificate
active
08008736
ABSTRACT:
Disclosed is new architecture of microelectromechanical system (MEMS) device. The device has a partially reflective optical layer, a deformable mechanical layer and a mirror layer, each of which forms an independent electrode. A support post separates the optical layer from the mechanical layer. The mirror layer is located and movable between a first position and a second position, which are located between the optical layer and the mechanical layer. The mirror is spaced from the support post, and mirror is responsive to voltages applied to the three electrodes, thereby moving between the first position and the second position. By applying various combinations of voltage differences between the optical layer and the mirror, and between the mirror and the mechanical layer, the location of the mirror between the first and second positions is tunable throughout the space between the two positions. The tunable MEMS device can be used as an analog display element or analog electrical device such as a tunable capacitor. The MEMS device of the disclosed architecture can also be operated in a non-analog manner.
REFERENCES:
patent: 2534846 (1950-12-01), Ambrose et al.
patent: 2590906 (1952-04-01), Tripp
patent: 2677714 (1954-05-01), Auwarter
patent: 3247392 (1966-04-01), Thelen
patent: 3439973 (1969-04-01), Paul et al.
patent: 3443854 (1969-05-01), Weiss
patent: 3653741 (1972-04-01), Marks
patent: 3656836 (1972-04-01), de Cremoux et al.
patent: 3679313 (1972-07-01), Rosenberg
patent: 3725868 (1973-04-01), Malmer, Jr. et al.
patent: 3728030 (1973-04-01), Hawes
patent: 3813265 (1974-05-01), Marks
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 3955190 (1976-05-01), Teraishi
patent: 3955880 (1976-05-01), Lierke
patent: 4099854 (1978-07-01), Decker et al.
patent: 4196396 (1980-04-01), Smith
patent: 4228437 (1980-10-01), Shelton
patent: 4377324 (1983-03-01), Durand et al.
patent: 4389096 (1983-06-01), Hori et al.
patent: 4392711 (1983-07-01), Moraw et al.
patent: 4403248 (1983-09-01), te Velde
patent: 4421381 (1983-12-01), Ueda et al.
patent: 4441789 (1984-04-01), Pohlack
patent: 4441791 (1984-04-01), Hornbeck
patent: 4445050 (1984-04-01), Marks
patent: 4459182 (1984-07-01), te Velde
patent: 4482213 (1984-11-01), Piliavin et al.
patent: 4497974 (1985-02-01), Deckman et al.
patent: 4498953 (1985-02-01), Cook et al.
patent: 4500171 (1985-02-01), Penz et al.
patent: 4519676 (1985-05-01), te Velde
patent: 4531126 (1985-07-01), Sadones
patent: 4560435 (1985-12-01), Brown et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4655554 (1987-04-01), Armitage
patent: 4662746 (1987-05-01), Hornbeck
patent: 4663083 (1987-05-01), Marks
patent: 4666254 (1987-05-01), Itoh et al.
patent: 4681403 (1987-07-01), te Velde et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4748366 (1988-05-01), Taylor
patent: 4779959 (1988-10-01), Saunders
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4856863 (1989-08-01), Sampsell et al.
patent: 4857978 (1989-08-01), Goldburt et al.
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4900136 (1990-02-01), Goldburt et al.
patent: 4900395 (1990-02-01), Syverson et al.
patent: 4925259 (1990-03-01), Emmett
patent: 4937496 (1990-06-01), Neiger et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4965562 (1990-10-01), Verhulst
patent: 4973131 (1990-11-01), Carnes
patent: 4982184 (1991-01-01), Kirkwood
patent: 5018256 (1991-05-01), Hornbeck
patent: 5022745 (1991-06-01), Zayhowski et al.
patent: 5028939 (1991-07-01), Hornbeck et al.
patent: 5037173 (1991-08-01), Sampsell et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5062689 (1991-11-01), Koehler
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5091983 (1992-02-01), Lukosz
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5099353 (1992-03-01), Hornbeck
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5136669 (1992-08-01), Gerdt
patent: 5142405 (1992-08-01), Hornbeck
patent: 5142414 (1992-08-01), Koehler
patent: 5153771 (1992-10-01), Link et al.
patent: 5162787 (1992-11-01), Thompson et al.
patent: 5168406 (1992-12-01), Nelson
patent: 5170156 (1992-12-01), DeMond et al.
patent: 5170283 (1992-12-01), O'Brien et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5179274 (1993-01-01), Sampsell
patent: 5192395 (1993-03-01), Boysel et al.
patent: 5192946 (1993-03-01), Thompson et al.
patent: 5206629 (1993-04-01), DeMond et al.
patent: 5212582 (1993-05-01), Nelson
patent: 5214419 (1993-05-01), DeMond et al.
patent: 5214420 (1993-05-01), Thompson et al.
patent: 5216537 (1993-06-01), Hornbeck
patent: 5226099 (1993-07-01), Mignardi et al.
patent: 5228013 (1993-07-01), Bik
patent: 5231532 (1993-07-01), Magel et al.
patent: 5233385 (1993-08-01), Sampsell
patent: 5233456 (1993-08-01), Nelson
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5254980 (1993-10-01), Hendrix et al.
patent: 5272473 (1993-12-01), Thompson et al.
patent: 5278652 (1994-01-01), Urbanus et al.
patent: 5280277 (1994-01-01), Hornbeck
patent: 5287096 (1994-02-01), Thompson et al.
patent: 5293272 (1994-03-01), Jannson et al.
patent: 5296950 (1994-03-01), Lin et al.
patent: 5305640 (1994-04-01), Boysel et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5312513 (1994-05-01), Florence et al.
patent: 5315370 (1994-05-01), Bulow
patent: 5323002 (1994-06-01), Sampsell et al.
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5325116 (1994-06-01), Sampsell
patent: 5326430 (1994-07-01), Cronin et al.
patent: 5327286 (1994-07-01), Sampsell et al.
patent: 5331454 (1994-07-01), Hornbeck
patent: 5339116 (1994-08-01), Urbanus et al.
patent: 5345328 (1994-09-01), Fritz et al.
patent: 5355357 (1994-10-01), Yamamori et al.
patent: 5358601 (1994-10-01), Cathey
patent: 5365283 (1994-11-01), Doherty et al.
patent: 5381232 (1995-01-01), Van Wijk
patent: 5381253 (1995-01-01), Sharp et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5411769 (1995-05-01), Hornbeck
patent: 5444566 (1995-08-01), Gale et al.
patent: 5446479 (1995-08-01), Thompson et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5452138 (1995-09-01), Mignardi et al.
patent: 5454906 (1995-10-01), Baker et al.
patent: 5457493 (1995-10-01), Leddy et al.
patent: 5457566 (1995-10-01), Sampsell et al.
patent: 5459602 (1995-10-01), Sampsell
patent: 5459610 (1995-10-01), Bloom et al.
patent: 5461411 (1995-10-01), Florence et al.
patent: 5471341 (1995-11-01), Warde et al.
patent: 5474865 (1995-12-01), Vasudev
patent: 5489952 (1996-02-01), Gove et al.
patent: 5497172 (1996-03-01), Doherty et al.
patent: 5497197 (1996-03-01), Gove et al.
patent: 5499037 (1996-03-01), Nakagawa et al.
patent: 5499062 (1996-03-01), Urbanus
patent: 5500635 (1996-03-01), Mott
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5506597 (1996-04-01), Thompson et al.
patent: 5515076 (1996-05-01), Thompson et al.
patent: 5517347 (1996-05-01), Sampsell
patent: 5523803 (1996-06-01), Urbanus et al.
patent: 5526051 (1996-06-01), Gove et al.
patent: 5526172 (1996-06-01), Kanack
patent: 5526327 (1996-06-01), Cordova, Jr.
patent: 5526688 (1996-06-01), Boysel et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5548301 (1996-08-01), Kornher et al.
patent: 5550373 (1996-08-01), Cole et al.
patent: 5551293 (1996-09-01), Boysel et al.
patent: 5552924 (1996-09-01), Tregilgas
patent: 5552925 (1996-09-01), Worley
patent: 5559358 (1996-09-01), Burns et al.
patent: 5561523 (1996-10-01), Blomberg et al.
patent: 5563398 (1996-10-01), Sampsell
patent: 5567334 (1996-10-01), Baker et al.
patent: 5570135 (1996-10-01), Gove et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5581272 (1996-12-01), Conner et al.
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5597736 (1997-01-01), S
Gebremariam Samuel A
Knobbe Martens Olson & Bear LLP
QUALCOMM MEMS Technologies Inc.
LandOfFree
Analog interferometric modulator device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Analog interferometric modulator device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Analog interferometric modulator device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2772611