Arrangements for and fabrication of mechanical suspension of...

Details Arrangements for and fabrication of mechanical suspension of... Arrangements for and fabrication of mechanical suspension of...

2011-04-19

2011-04-19

Dickey, Thomas L (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

Reexamination Certificate

active

07928522

ABSTRACT:
In one embodiment a micro-electro mechanical system is disclosed. A MEMS structure can include a frame, a movable structure and a set of structural beams to suspend the movable structure from the frame. The system can also include a set of conductor routing beams. The conductor routing beams can provide a conductive path from the frame to the movable structure. The set of structural beams can have a spring rate that is more than ten times the spring rate of the set of conductor routing beams. Accordingly, multiple routing beams can be utilized to support multiple conductors without significantly affecting the mechanical movement or dynamic properties of the movable structure.

REFERENCES:
patent: 2004/0207034 (2004-10-01), Sakai
patent: 2005/0219016 (2005-10-01), Chou et al.
patent: 2008/0237755 (2008-10-01), Chou

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