Apparatus and method for microfabricated multi-dimensional...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

Reexamination Certificate

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Reexamination Certificate

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07911010

ABSTRACT:
A universal microelectromechanical MEMS nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables.

REFERENCES:
patent: 6602791 (2003-08-01), Ouellet et al.
patent: 6746891 (2004-06-01), Cunningham et al.
patent: 2007/0132043 (2007-06-01), Bradley et al.
patent: 2007/0145966 (2007-06-01), Shekhawat et al.
patent: 2008/0233744 (2008-09-01), Kaul et al.
patent: 2009/0219104 (2009-09-01), Van Beek et al.

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