Apparatus for mounting an absolute pressure sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

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Details

257418, 257419, 257420, 73720, 73721, 73726, 73727, H01L 2984, H01L 2996

Patent

active

054593514

ABSTRACT:
An absolute pressure sensor subassembly includes a top cap bonded to a pressure sensor die and enclosing a reference vacuum. The subassembly is initially held in place within a housing by a vacuum or sublimeable solid adhesive while wire bonds from the subassembly to the housing leads are completed. A self-contained adhesive drop on the inner surface of the housing cover contacts the sensor subassembly when the cover is placed on the housing body and the sensor subassembly is supported by the adhesive drop.

REFERENCES:
patent: 4838089 (1989-06-01), Okada et al.
patent: 5029478 (1991-07-01), Wamstad
patent: 5097841 (1992-03-01), Moriuchi et al.
patent: 5257547 (1993-11-01), Boyer

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