Flexible membrane for carrier head

Flexible membrane for carrier head

Fluid deflecting device for use in work piece holder during a se

Guide ring removal device

Headstock of a polishing machine

Holder for flat workpieces, particularly semiconductor wafers

Mechanically stabilized retaining ring for chemical mechanical p

Method and apparatus for disposable bladder carrier assembly

Methods and apparatus for polishing wafers

Molded non-abrasive substrate carrier for use in polishing...

Polishing apparatus

Polishing apparatus with carrier ring and carrier head...

Polishing apparatus, semiconductor device manufacturing...

Polishing head with a floating knife-edge

Polishing machine

Recyclable retaining ring assembly for a chemical mechanical...

Retainer ring design for polishing head of chemical-mechanical p

Retainer with a wear surface for chemical mechanical polishing

Retaining ring for chemical mechanical polishing

Retaining ring for wafer carriers