Flexible membrane for carrier head

Details Flexible membrane for carrier head Flexible membrane for carrier head

2011-05-31

2011-05-31

Eley, Timothy V (Department: 3723)

Abrading

Work holder

Work rotating

C428S119000, C428S120000, C451S288000, C451S290000

Reexamination Certificate

active

07950985

ABSTRACT:
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.

REFERENCES:
patent: 5916412 (1999-06-01), Nakashiba et al.
patent: 5964653 (1999-10-01), Perlov et al.
patent: 6056632 (2000-05-01), Mitchel et al.
patent: 6089961 (2000-07-01), Cesna et al.
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6186880 (2001-02-01), Gonzalez et al.
patent: 6210255 (2001-04-01), Zuniga et al.
patent: 6435949 (2002-08-01), Katsuoka et al.
patent: 6450868 (2002-09-01), Zuniga et al.
patent: 6483354 (2002-11-01), Gasparik
patent: 6602116 (2003-08-01), Prince
patent: 6648740 (2003-11-01), Perlov et al.
patent: 6663466 (2003-12-01), Chen et al.
patent: 6722965 (2004-04-01), Zuniga et al.
patent: 6857931 (2005-02-01), Chen et al.
patent: 6857945 (2005-02-01), Chen et al.
patent: 6872130 (2005-03-01), Zuniga
patent: 6890249 (2005-05-01), Zuniga et al.
patent: 7044838 (2006-05-01), Maloney et al.
patent: 7081042 (2006-07-01), Chen et al.
patent: 7101272 (2006-09-01), Chen et al.
patent: 7101273 (2006-09-01), Tseng et al.
patent: 7198561 (2007-04-01), Chen et al.
patent: 7255771 (2007-08-01), Chen et al.
patent: 7575504 (2009-08-01), Zuniga et al.
patent: 7654888 (2010-02-01), Zuniga et al.
patent: 7727055 (2010-06-01), Zuniga et al.
patent: 2005/0215182 (2005-09-01), Fuhriman et al.
patent: 1038636 (2000-09-01), None
patent: WO 99/02304 (1999-01-01), None
patent: WO 01/72473 (2001-10-01), None
patent: WO 2006/049269 (2006-05-01), None

Affiliated with

Also associated with

Rating

Flexible membrane for carrier head does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flexible membrane for carrier head, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flexible membrane for carrier head will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2697309