Fluid deflecting device for use in work piece holder during a se

Details Fluid deflecting device for use in work piece holder during a se Fluid deflecting device for use in work piece holder during a se

1998-09-02

2000-06-06

Eley, Timothy V.

Abrading

Work holder

Work rotating

451364, 451451, B24B 4106

Patent

active

060711841

ABSTRACT:
A fluid deflection device for use in a work piece holder during a semiconductor wafer grinding process is disclosed. The fluid deflection device includes an annular, upstanding splash fence, and an attachment portion associated with the splash fence and configured to attach to the work piece holder, thereby to hold the splash fence in a position to inhibit fluid from flowing between rotatable and non-rotatable parts of the work piece holder.

REFERENCES:
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patent: 4864779 (1989-09-01), Ozaki
patent: 5005321 (1991-04-01), Barth et al.
patent: 5031325 (1991-07-01), Walter et al.
patent: 5062384 (1991-11-01), Foley et al.
patent: 5148652 (1992-09-01), Herzog
patent: 5159374 (1992-10-01), Groshong
patent: 5163252 (1992-11-01), Garner et al.
patent: 5185965 (1993-02-01), Ozaki
patent: 5766451 (1998-06-01), Sparling
patent: 5896640 (1999-04-01), Lanzinski et al.

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