Flexible membrane for carrier head

Details Flexible membrane for carrier head Flexible membrane for carrier head

2007-04-27

2010-06-01

Eley, Timothy V (Department: 3724)

Abrading

Work holder

Work rotating

C428S119000, C428S120000, C451S288000, C451S290000

Reexamination Certificate

active

07727055

ABSTRACT:
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.

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