Retaining ring for wafer carriers

Details Retaining ring for wafer carriers Retaining ring for wafer carriers

2005-03-22

2005-03-22

Nguyen, George (Department: 3723)

Abrading

Work holder

Work rotating

C451S288000, C451S287000, C451S041000

Reexamination Certificate

active

06869348

ABSTRACT:
A long-lasting retaining ring for wafer carriers used in chemical mechanical planarization. A groove is disposed around the retaining ring, with the groove opening facing the mounting plate. A ridge is disposed in the groove. A bladder is disposed in the groove and is pressed between the ridge and the mounting plate. Pressure in the bladder can be maintained or adjusted to deform the bladder and thereby force the retaining ring onto the polishing pad as the retaining ring is worn. Prior to adding pressure to the bladder, the ridge forces the bladder to very closely conform to the dimensions of the groove. Thus, during use, bladder deformation is not wasted on conforming the bladder to the groove shape, but instead can be used to force the retaining ring further in the direction of the pad. The ridge thereby increases the distance the retaining ring can move towards the pad.

REFERENCES:
patent: 5310455 (1994-05-01), Pasch et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5795215 (1998-08-01), Guthrie et al.
patent: 6136710 (2000-10-01), Quek et al.
patent: 6206758 (2001-03-01), Lai et al.
patent: 6231428 (2001-05-01), Maloney et al.
patent: 6277008 (2001-08-01), Masuta et al.
patent: 6354927 (2002-03-01), Natalicio
patent: 6390904 (2002-05-01), Gleason et al.
patent: 6435949 (2002-08-01), Katsuoka et al.
patent: 6540592 (2003-04-01), Schultz et al.
patent: 6579151 (2003-06-01), Tseng et al.
patent: 6592437 (2003-07-01), Boyd et al.
patent: 6645057 (2003-11-01), Quek
patent: 6722963 (2004-04-01), Brown

Affiliated with

Also associated with

Rating

Retaining ring for wafer carriers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Retaining ring for wafer carriers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Retaining ring for wafer carriers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3444930