Headstock of a polishing machine

Abrading – Work holder – Work rotating

Patent

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Details

451288, 451388, B24B 722

Patent

active

060274018

ABSTRACT:
The present invention provides a headstock of a polishing machine, having a simple structure and capable of tracing a pad surface. The headstock of the present invention is formed of a spindle, a holder plate, a spherical bearing, and a plate spring. The holder plate is connected to a lower end portion of the spindle via the spherical bearing and the plate spring. A workpiece is attached to the lower surface of the holder plate. The spherical bearing has a center of tilting movement on a rotation axis of the spindle. The holder plate has a balance plate. The center of gravity of the holder plate including the balance plate coincides with the center of tilting movement of the spherical bearing. The plate spring has an axisymmetric shape. More specifically, the plate spring has an opening portion at the center and a plurality of arm portions extending to the outer periphery in the diameter direction. The plate spring is connected to the lower end of the spindle by use of first fitting holes which are formed along the inner periphery, and the plate spring is also attached to the holder plate by use of second fitting holes which are formed in the distal end of the plate spring. The first and second fitting holes are respectively located on small- and large-diameter circles which are concentrically arranged around the rotation axis of the spindle.

REFERENCES:
patent: 4270314 (1981-06-01), Cesna
patent: 5423558 (1995-06-01), Koeth et al.
patent: 5441444 (1995-08-01), Nakajima
patent: 5476414 (1995-12-01), Hirose et al.

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